When the ceramic plane is processed to a certain finish, the surface will be particularly smooth and beautiful, like a mirror. Some ceramic plates and rods made of zirconia ceramics can be polished to a great finish.

First, mechanical polishing

Mechanical polishing It is mainly by cutting, or make the surface of the material plastic deformation and remove the convex part of the workpiece surface to get a smooth polishing method. Generally use oil stone, wool wheel, sandpaper, etc., mainly manual operation. High surface quality requirements can be used by the method of super polishing. Super finishing polishing is the use of special grinding tools, in the polishing liquid containing abrasives, tightly pressed on the workpiece surface for high-speed rotation. The mechanism of mechanical polishing is that the wedge extrusion and the rebound of the polishing fluid increase the micro-cutting effect and the micro-plastic flow effect of the machined material to achieve the polishing effect.

Second, chemical mechanical polishing (CMP)

The method of polishing by using the combined effect of the corrosion action of polishing fluid and the mechanical removal action. The biggest feature of this polishing method is that the powder is softer than the mechanical properties of the processed material and can react with the processed material. In the same sliding motion as usual polishing, the small mechanical-chemical reaction at the local contact point between the powder and the processed material partially breaks off due to friction, and the processing is carried out.

Three, ultrasonic polishing

Ultrasonic polishing is to put the workpiece into the abrasive suspension and put it together in the ultrasonic field, and rely on the ultrasonic shock effect to grind and polish the grinding material on the surface of the workpiece. Its main function is that the abrasive particles under ultrasonic vibration, with a great speed and acceleration constantly impact the machining surface, the machining surface of the micro convex part of the micro cutting, so as to achieve the purpose of polishing. All kinds of hard and brittle materials such as structural ceramics and graphite can be processed by ultrasonic machining, and the processing efficiency increases with the increase of material brittleness. Moreover, the tool has little effect on the force and heat of the workpiece, and does not produce deformation, burn, metamorphic layer. The equipment is simple, easy to use and maintain, easy to operate and low cost.

Four, electrophoretic polishing

Electrophoretic phenomenon is applied to a non-contact non-destructive polishing method for ceramic workpieces. Because there is no external load, the removal of brittle and hard ceramic materials depends on particle collision and micro-cutting. Continuous collision and micro-cutting make the ceramic surface local micro-fatigue spalling and very fine ploughing.

Five, fluid polishing

The surface of the workpiece is washed by the flowing liquid and the abrasive particles carried by it to achieve the purpose of polishing. Not only can be finished processing can also remove burrs, the effect is very good, hydrodynamic grinding is driven by hydraulic pressure, the medium is mainly made of special compounds with good flow under low pressure and incorporated into abrasive, abrasive can be made of silicon carbide powder.

Six, magnetic grinding and polishing

Magnetic grinding and polishing is the use of magnetic abrasive under the action of the magnetic field to form a flexible abrasive brush, relative to the workpiece movement, resulting in cutting, marking, sliding, extrusion and rolling phenomena, grinding and polishing of the workpiece. This method has the advantages of high processing efficiency, good quality and easy control of processing conditions.

Seven, laser polishing

Laser polishing is the use of a certain energy density and wavelength of laser beam irradiation of a specific workpiece, so that a thin layer of material on the surface of the melt or evaporation to obtain a smooth surface. Laser polishing precision is high, non-contact processing, strong controllability, automatic processing process, leaving no polishing slag, clean and pollution-free, simple process, can effectively reduce surface roughness, greatly improve polishing efficiency, can polish irregular surfaces, and polished ceramics are more shiny and beautiful, very texturized, is one of the best choices for hard and brittle ceramic material polishing.

In summary, mechanical polishing, chemical mechanical polishing and electronic chemical polishing are suitable for aluminum nitride ceramic substrate polishing, each method has its advantages and disadvantages. The choice of polishing method should consider a variety of factors, such as polishing quality requirements, surface geometry requirements, process and equipment costs. In practical applications, it is necessary to select according to the actual situation.